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  • Model: Tescan Mira3
  • Resolution: 1.0 nm, at 30kV and high vacuum mode
  • Electron source: High brightness Schottky emitter
  • Acceleration voltage: 50V to 30kV
  • Vacuum: high vacuum <9 × 10-3 Pa, low vacuum 7 to 500 Pa.
  • Chamber: Internal diameter: 340 mm (width) × 315 mm (depth)
  • Beam Deceleration Technology (BDT) for resolution at low beam voltages
  • Decontaminator/plasma cleaner



  • Standard ET SE detector
  • In-beam (in-lens) back scatter detector
  • In-beam (in-lens) secondary electron detector
  • Retractable back scatter detector
  • Low vacuum (up to 500 Pa) secondary electron detector
  • Panchromatic motorized retractable CL detector (spectral range of 185 – 850 nm)
  • Energy dispersive spectrometer: X-MaxN 80 from Oxford Instruments (124 eV, 80mm2)
  • Electron backscatter diffraction spectrometer: NordlysNano from Oxford Instruments
  • Analytical software: Automated AZtecEnergy



Carl Alwmark

Carl Alwmark
Carl [dot] alwmark [at] geol [dot] lu [dot] se