Instrument
Instrument
- Model: Tescan Mira3
- Resolution: 1.0 nm, at 30kV and high vacuum mode
- Electron source: High brightness Schottky emitter
- Acceleration voltage: 50V to 30kV
- Vacuum: high vacuum <9 × 10-3 Pa, low vacuum 7 to 500 Pa.
- Chamber: Internal diameter: 340 mm (width) × 315 mm (depth)
- Beam Deceleration Technology (BDT) for resolution at low beam voltages
- Decontaminator/plasma cleaner
Detectors
- Standard ET SE detector
- In-beam (in-lens) back scatter detector
- In-beam (in-lens) secondary electron detector
- Retractable back scatter detector
- Low vacuum (up to 500 Pa) secondary electron detector
- Panchromatic motorized retractable CL detector (spectral range of 185 – 850 nm)
- Energy dispersive spectrometer: X-MaxN 80 from Oxford Instruments (124 eV, 80mm2)
- Electron backscatter diffraction spectrometer: NordlysNano from Oxford Instruments
- Analytical software: Automated AZtecEnergy